Lecture Notes and Reading Assignments
All reading assignments refer to the 2nd edition of the book. Homework assignments to be submitted via email as per instructions at the bottom of the page. There is no labs in the first week of classes.
Week 2 (9/5)
Organizational meeting, discussion of course objectives and structure.
Introduction to microfabrication, clean room, review of safety and clean room procedures. Handout #1a: Introduction to Microfabrication (pdf), Handout #1b: Clean room environment (pdf),
Homework Assignment #1: Cleanroom safety (pdf) and solutions (pdf)
Week 3 (9/12)
Discussion of laboratory project. Handout #2a: Project overview (pdf), Handout #2b: Flow Cytometer on a Chip (pdf). Reading assignment: book chapter 1, chapter 2, sections 2.2, 2.4 and 2.7
Homework Assignment #2: Silicon and project (pdf) and solutions (pdf).
Week 4 (9/19)
Handout #3: Photolithography I (pdf). Reading: book chapter 7 sections 7.1, 7.2, 7.3, 7.4, 7.5, 7.6, 7.9, 7.10
Homework Assignment #3: Photolithography I (pdf) and solutions (pdf).
Week 5 (9/26)
Handout #4: Wet Etching (pdf). Reading: book chapter 11 section 11.1; book chapter 19 section 19.5, Petersen paper section III (pdf), Williams/Muller paper (pdf), Madou handout (pdf).
Homework Assignment #4: Wet Etching (pdf) and solutions (pdf).
Week 6 (10/3)
Handout #5: Thermal Oxidation (pdf). Reading assignment: book chapter 4, sections 4.1, 4.2, 4.3, 4.4, 4.9
Homework Assignment #5: Thermal oxidation (pdf) and solutions (pdf).
Week 7 (10/10)
Handout #6: Thin Film Deposition (pdf). Reading: book chapter 12 section 12.1, 12.2, 12.3, 12.4, 12.5, 12.6, 12.7, 12.14; book chapter 13 section 13.1, 13.2
Homework Assignment #6: Thin Films (pdf) and solutions (pdf).
Week 8 (10/17)
Handout #7: Photolithography II (pdf). Reading: book chapter 8 sections 8.1, 8.2, 8.3, 8.4, 8.5, 8.6, 8.9; book chapter 9 sections 9.1, 9.2, 9.3
Homework Assignment #7: Photolithography II (pdf) and solutions (pdf).
Week 9 (10/24)
Handout #8: Etching II: Dry Etching (pdf). Reading: book chapter 11 section 11.3, 11.4, 11.5, 11.6, 11.7, 11.10
Week 10 (10/31)
Midterm Examination: In class examination, on all topics up to and including dry etching. Dry etching questions are going to be qualitative in nature. Students are also expected to answer questions on the lab work and their lab project. You are allowed to have a double sided hand-written summary sheet of notes pertaining to the class material. The summary sheet will be submitted along with the exam. Midterm Solutions (pdf).
Week 11 (11/7)
Handout #9: Diffusion, Ion-implantation (pdf). Reading: book chapter 3 section 3.1, 3.2, 3.3, 3.4, 3.5, 3.6, 3.8; book chapter 5 section 5.1, 5.2, 5.3, 5.8
Week 12 (11/14)
Handout #10: Packaging, Flow Cytometer Integration. Handout #11a: Wafer Bonding(pdf) and Handout #11b: Packaging (pdf). Reading: book chapter 16, sections 16.1, 16.2, 16.3, 16.4.
Week 13 (11/28)
Handout #11: Softlithography (pdf)
Week 14 (12/5)
Handout #12: Advanced Topics in Micro and Nano fabrication. Handout #12: CMOS and MEMS Technologies (pdf), Reading: book chapter 19, sections 19.6, 19.7, 19.8, 19.9.
Final Presentation Schedule
Students will make a final presentation according to their lab sections as shown in the table below. Room to be announced.
Section I (Th AM) : 8.30 am on December 6th (Thursday), Clark 113
Section II (Th Eve) : 5 pm on December 6th (Thursday), Clark 113
Section III (Fr PM) : 1.30 pm on December 7th (Friday), Clark 113
Lab/device fabrication report (Due: Sunday, December 2nd, 5 p.m.)
Final Project (Due: Sunday, December 16th, 5 p.m.)
Microfabrication; Energy, Materials and Environment. The purpose of the final project and report is (i) to reinforce your understanding of how your microfabricated device was constructed, and (ii) to investigate the broader impacts of microfabrication processes (economic and environmental).
You are allowed to discuss the paper with your fellow students BUT you must do the calculations and report on your own! Keep a tally and report the amount of time that you have worked on this final project and report.
Reading: NATURE editorial (pdf), paper (pdf) and support material (pdf): The 1.7 Kilogram Microchip: Energy and Material Use in The Production of Semiconductor Devices, E. D. Williams, R.U. Ayres, and M. Heller, Environmental Science and Technology, October 24th, 2002.
Question 1: Do a critical review/summary of the paper (1 page)
Question 2: Based on the information given in the paper and references therein AND your laboratory notes
i) Summarize your project work in a process flow diagram.
ii) Construct a diagram for your class project (similar to that shown in Figure 1 of the paper).
iii) Calculate the material amount for fabricating your chip (see Figure 2 of the paper).
iv) Calculate the energy costs for production and use for your chip (see Figure 3 of the paper).
The final project writeup, including figures, should be no longer than 5 single space typeset pages long. Use an excel spreadsheet to do the calculations.
PLEASE SEND ELECTRONIC VERSION of your homework, lab device fabrication report and final project (pdf and excel files) TO jhu495 at gmail dot com, or jhu773 at gmail dot com if you are enrolled in the graduate level course. Please use your fist name initial and last name as the name of the files. For example aandreou.pdf and aandreou.xls. Once Blackboard problems with organization of the course are sorted out, you will be able to submit your work there.