Course Resources
Bibliography
1. Introduction to Microelectronic Fabrication, 2nd Edition, Richard C. Jaeger, Volume V; Modular Series on Solid State Devices , G. W. Neudeck and R.F. Pierret eds., Prentice Hall, 2002.
2. Fundamentals of Microfabrication : The Science of Miniaturization, Marc J. Madou, CRC Press, 2nd edition, 2002.
3. Silicon as Mechanical Material , K. E. Petersen, Proceedings of IEEE, vol. 70, no. 5, pp. 420-457, May 1982 (pdf).
4. The 1.7 Kilogram Microchip: Energy and Material Use in The Production of Semiconductor Devices, E. D. Williams, R.U. Ayres, and M. Heller (pdf). Supplementary information (pdf) and Nature editorial on this article (pdf).
Microfabrication and Microsystems Resources
International Solid-State Circuits Conference (ISSCC). Sponsored by the IEEE Solid-State Circuits Society (SSCS) this meeting is held annually in San Francisco. This is the forum where advances in integrated circuits and systems get reported first to the public! To get your paper in this conference, you must sign your life that you will not make any disclosures of your work before this conference. Usually the place to be just the weekend and week after the SuperBowl!
Transducers Is the annual conference/forum sponsored by IEEE Electron Devices Society (EDS) and Materials Research Society (MRS) for sensors, actuators and MEMS Find out what is the latest in fabrication technology and microsystems. This event started at the 1981 MRS Symposium on Solid-State Transducers. For a historical perspective please see 30th year anniversary celebration.
IEEE MEMS conference is another premier event in this area.
International Symposium on Circuits and Systems (ISCAS). Sponsored by the IEEE Circuits and System Society (CAS) this meeting has a more broad audience, mostly academic with interests ranging from devices to circuits and systems as well as signal processing.
The above society also have their corresponding journals: Journal of Microelectromechanical Systems, Journal of Solid-State Circuits, Transaction on Electron Devices and Transactions on Circuits and Systems I and II. The above journals are available on-line through IEEE Explore. Access to this resource is free if you do it from JHU or through a VPN tunnel to JHU.
Computer Aided Design (CAD) Tools
Frequently Asked Questions
Related JHU Links
520.773 Advanced Topics in Fabrication and Micro-engineering