520/530/580.495

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Course Logistics

Time and Place

Lectures: Wednesday 1.30-2.20 p.m., Maryland 110

Lab section I: Th. 9 a.m.-1 p.m., Whitaker Microfabrication Lab - Clark Hall 119A
Lab section II: Th. 5-9 p.m., Whitaker Microfabrication Lab - Clark Hall 119A
Lab section III: Fr 1-5 p.m., Whitaker Microfabrication Lab - Clark Hall 119A

Teaching Assistants

Sixuan Li, sli124 at jhu dot edu, Clark Hall 207

Christos Sapsanis, csapsanis at jhu dot edu, Barton Hall 400B

Grading (same for 5xx.495 and 520.773)

(25%) Homework problems.

(25%) Written, mid-term examination.

(10%) Laboratory participation, prelab, postlab.

(15%) Device fabrication report and class presentation.

(25%) Final project (grading rubric)

Homework problems are due on Wednesday (to be submitted before lecture). All submissions must be done via email as per instructions in the syllabus page. Late homework will have an automatic 50% grade reduction. Homework that is more than 2 weeks late will not be accepted and will not be graded. Frequently asked questions and answers about grading can be found here.

The requirements for the final presentation can be found here. The final presentations will be done the last week of classes. Group should arrive at their regular lab sessions ready for their presentations and we will proceed to some small meeting room in Clark Hall for the presentations. Please bring your own laptop to be used for the presentation. The device fabrication report is a summary of what you have done in this class. It should be written in the format of an IEEE paper.

Ethics

Homework and pre-laboratory assignments: In a laboratory course, you have ample opportunities for collaboration. Developing the ability to work within a group is certainly one of the objectives for this course. However, homework assignments, pre-lab write-ups and examinations must be done on your own. Please read here what you are supposed to do alone and how much you are allowed to collaborate.

Laboratory safety and environment awareness: When working in the lab you must follow all proper procedures to avoid injuring yourself or anyone else that works with you. When disposing chemical waste it is important that you follow proper laboratory procedures to assure that our environment stays clean and free from contaminants. Please read the Laboratory Safety handout, and revisit it periodically to refresh yourself and especially when in doubt about a particular process or procedure. After reading the Laboratory Safety handout please download, print and sign the pledge to be a good lab citizen and follow all safety rules and regulations. The signed pledge must be handed in with the first homework assignment. Please also note the recent lab safety memo from the University emphasizing the need for appropriate apparel during the lab i.e. you must wear long pants and closed-toe shoes.

Website

www.ece.jhu.edu/~andreou/495

Textbook

We will use the book "The Science and Engineering of Microelectronic Fabrication" by Steve Campbell as the main textbook for the course. The third edition of the book has been renamed to "Fabrication Engineering at the Micro and Nanoscale" but the content relevant to our course has remained pretty much the same. You can purchase either of these books from any online bookstore.

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