520/530/580.495

Microfabrication Laboratory

an image of a silicon/SU-8 waveguides on silicon wafer

Course Description

This is a laboratory course on the principles of microfabrication for microelectronics, sensors, MEMS, and other synthetic microsystems that have applications in medicine and biology. Course comprises of laboratory work and accompanying lectures that cover silicon oxidation, photolithography, thin film deposition, photoresist deposition, plating, etching, packaging, design and analysis CAD tools, and foundry services. Same as 530.495.

 

Professor Andreas G. Andreou, Barton Hall 400B
(410)-516-8361
andreou at jhu dot edu

Professor Jeff T.H. Wang, Latrobe Hall 108
(410)-516-7086
thwang at jhu dot edu

Mr. Huy Vo, Lab manager, Clark Hall 118
(410)-516-4048
huyvo at bme dot jhu dot edu


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