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Microfabrication Laboratory

Laboratory Assignments

The project for the course is a flow cytometer. Here is some guidelines on what to include in the prelab, postlab as well as the lab report.

Week 1 (8/31-9/1)

No lab sessions the first week of classes (first day of classes is usually Thursday). Labs begin after first lecture in the second week of classes.

Week 2

Lab #1a: Laboratory orientation and instrumentation.

Week 3

Lab #1b: Introduction to CAD tools for mask design. Please download Lab1bFiles (zip archive) that includes templates for the CAD tools. Account passwords for computer lab will be given to students by T.As. during lab sections.

Note: When you download password protected pdf and zip files under Mac OSX, sometimes the file will fail to open upon clicking on it. Download the file instead on the desktop and open it there, do not open directly from the browser window.

Week 4

Lab #2_FC: (Lithography I)

Week 5

Lab #3_FC: (KOH etch), Seidel Paper (pdf)

Week 6

Lab #4_FC: (Oxidation I)

Week 7

Lab #5_FC: (Alluminum evaporation)

Week 8

Lab #6_FC: (Lithography II, metal patterning)

Week 9

Lab #7_FC: (Lithography III, oxide removal)

Week 10

Lab #8_FC: (Anodic Bonding)

Week 11

Packaging and preparation for testing.

Week 12

Testing and experimental results analysis.

Week 13

Testing and experimental results analysis.

Week 14 (12/7-8)

Class presentations and discussion.