520/530/580.495

Course Logistics

Time and Place

Lectures: Wednesday 1.30-2.20 p.m., Shaffer 300

Lab section I: Th 1 p.m. - 5 p.m., Whitaker Microfabrication Lab - Clark Hall 119A

Lab section IV: Fr 1 p.m. - 5 p.m., Whitaker Microfabrication Lab - Clark Hall 119A

Lab section V: Th. 8 a.m. - 12 p.m., Whitaker Microfabrication Lab - Clark Hall 119A

Teaching Assistants

Alex Stark, Office hours: TBD, alejandrostark at gmail dot com, Clark Hall 122

Christos Sapsanis, csapsanis at gmail dot com, Barton Hall 400B

Grading (same for 5xx.495 and 520.773)

(25%) Homework problems.

(25%) Written, mid-term examination.

(20%) Laboratory participation, lab-book, prelab, postlab,

(5%) Class presentation.

(25%) Final project.

Homework problems are due on Wednesday (to be handed before lecture). Late homework will have an automatic 50% grade reduction. Homework that is more than 2 weeks late will not be accepted and will not be graded. Frequently assked questions and answers about grading can be found here.

The requirements for the final presentation can be found here. The final presentations will be done the last week of classes. Group should arrive at their regular lab sessions ready for their presentations and we will proceed to some small meeting room in Clark Hall for the presentations. Please bring your own laptop to be used for the presentation.

Ethics

Homework and pre-laboratory assignments: In a laboratory course, you have ample opportunities for collaboration. Developing the ability to work within a group is certainly one of the objectives for this course. However, homework assignments, pre-lab write-ups and examinations must be done on your own. Please read here what you are supposed to do alone and how much you are allowed to collaborate.

Laboratory safety and environment awareness: When working in the lab you must follow all proper procedures to avoid injuring yourself or anyone else that works with you. When disposing chemical waste it is important that you follow proper laboratory procedures to assure that our environment stays clean and free from contaminants. Please read the Laboratory Safety handout, and revisit it periodically to refresh yourself and especially when in doubt about a particular process or procedure. After reading the Laboratory Safety handout please download, print and sign the pledge to be a good lab citizen and follow all safety rules and regulations. The signed pledge must be handed in with the first homework assignment. Please also note the recent lab safety memo from the University emphasizing the need for appropriate apparel during the lab i.e. you must wear long pants and closed-toe shoes.

Website

www.ece.jhu.edu/~andreou/495

Textbook

We will use the book "The Science and Engineering of Microelectronic Fabrication" by Steve Campbell as the main textbook for the course. The third edition of the book has been renamed to "Fabricaiton Engineering at the Micro and Nanoscale" but the content relevant to our course has remained pretty much the same. You can purchase either of these books from any online bookstore.

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Lecture Notes and Reading Assignments

All reading assignments refer to the 2nd edition of the book.

Week 2 (9/7)

Organizational meeting, discussion of course objectives and structure.

Introduction to microfabrication, clean room, review of safety and clean room procedures. Handout #1a: Introduction to Microfabrication (pdf), Handout #1b: Clean room environment (pdf),

Homework Assignment #1: Cleanroom safety (pdf) and solutions (pdf)

Week 3 (9/14)

Discussion of laboratory project. Handout #2a: Project overview (pdf), Handout #2b: Flow Cytometer on a Chip (pdf). Reading assignment: book chapter 1, chapter 2, sections 2.2, 2.4 and 2.7

Homework Assignment #2: Silicon and project (pdf) and solutions (pdf).

Week 4 (9/21)

Handout #3: Photolithography I (pdf). Reading: book chapter 7 sections 7.1, 7.2, 7.3, 7.4, 7.5, 7.6, 7.9, 7.10

Homework Assignment #3: Photolithography I (pdf) and solutions (pdf).

Week 5 (9/28)

Handout #4: Thermal Oxidation (pdf). Reading assignment: book chapter 4, sections 4.1, 4.2, 4.3, 4.4, 4.9

Homework Assignment #4: Thermal oxidation (pdf) and solutions (pdf).

Week 6 (10/5)

Handout #5: Wet Etching (pdf). Reading: book chapter 11 section 11.1; book chapter 19 section 19.5, Petersen paper section III (pdf), Williams/Muller paper (pdf), Madou handout (pdf).

Homework Assignment #5: Wet Etching (pdf) and solutions (pdf).

Week 7 (10/12)

Handout #6: Photolithography II (pdf). Reading: book chapter 8 sections 8.1, 8.2, 8.3, 8.4, 8.5, 8.6, 8.9; book chapter 9 sections 9.1, 9.2, 9.3

Homework Assignment #6: Photolithography II (pdf) and solutions (pdf).

Week 8 (10/19)

Handout #7: Thin Film Deposition (pdf). Reading: book chapter 12 section 12.1, 12.2, 12.3, 12.4, 12.5, 12.6, 12.7, 12.14; book chapter 13 section 13.1, 13.2

Homework Assignment #7: Thin Films (pdf) and solutions (pdf).

Week 9 (10/26)

Handout #8: Etching II: Dry Etching (pdf). Reading: book chapter 11 section 11.3, 11.4, 11.5, 11.6, 11.7, 11.10

Week 10 (11/2)

Midterm Examination: In class examination, open notes, open books on all topics up to and including dry etching. Dry etching questions are going to be qualitative in nature. Students are also expected to answer questions on the lab work and their lab project. Make sure you have with you your handouts posted on the web for the material not in the book. Preparation of a summary sheet ot help you find the material during the exam is strongly advised. Midterm Solutions (pdf).

Week 11 (11/9)

Handout #9: Softlithography (pdf)

Week 12 (11/16)

Handout #10: Diffusion, Ion-implantation (pdf). Reading: book chapter 3 section 3.1, 3.2, 3.3, 3.4, 3.5, 3.6, 3.8; book chapter 5 section 5.1, 5.2, 5.3, 5.8

Week 13 (11/30)

Flow Cytometer Integration. Handout #11a: Wafer Bonding(pdf) and Handout #11b: Packaging (pdf). Reading: book chapter 16, sections 16.1, 16.2, 16.3, 16.4.

Week 14 (12/7)

Advanced Topics in Micro and Nano fabrication. Handout #12: CMOS and MEMS Technologies (pdf), Reading: book chapter 19, sections 19.6, 19.7, 19.8, 19.9.

Final Presentation Schedule

Students will make a final presentation according to their lab sections as shown in the table below. Room to be announced.

Section I (Th PM) : 1.30 pm on December 8th (Thursday), Clark 113
Section IV (Fr PM) : 1.30 pm on December 9th (Friday), Clark 113
Section V (Th AM) : 8.30 am on December 8th (Thursday), Clark 113

Final Project (Due: Saturday, December 17th, 5 p.m.)

Microfabrication; Energy, Materials and Environment. The purpose of the final project and report is (i) to reinforce your understanding of how your microfabricated device was constructed, and (ii) to investigate the broader impacts of microfabrication processes (economic and environmental).

You are allowed to discuss the paper with your fellow students BUT you must do the calculations and report on your own! Keep a tally and report the amount of time that you have worked on this final project and report.

Reading: NATURE editorial (pdf), paper (pdf) and support material (pdf): The 1.7 Kilogram Microchip: Energy and Material Use in The Production of Semiconductor Devices, E. D. Williams, R.U. Ayres, and M. Heller, Environmental Science and Technology, October 24th, 2002.

Question 1: Do a critical review/summary of the paper (1 page)

Question 2: Based on the information given in the paper and references therein AND your laboratory notes

i) Summarize your project work in a process flow diagram.

ii) Construct a diagram for your class project (similar to that shown in Figure 1 of the paper).

iii) Calculate the material amount for fabricating your chip (see Figure 2 of the paper).

iv) Calculate the energy costs for production and use for your chip (see Figure 3 of the paper).

The report, including figures, should be no longer than 5 single space typeset pages long. Use an excel spreadsheet to do the calculations.

PLEASE SEND ELECTRONIC VERSION (pdf and excel files) TO jhu495 at gmail dot com, or jhu773 at gmail dot com if you are enrolled in the graduate level course. Please use your last name as the name of the files. For example andreou.pdf and andreou.xls

Laboratory Assignments

The project for the course is a flow cytometer. Here is some guidelines on what to include in the prelab, postlab as well as the lab report.

Week 1 (9/8-9/9)

No lab sessions the first week of classes (first day of classes is usually Thursday). Labs begin after first lecture in the second week of classes.

Week 2

Lab #1a: Laboratory orientation and instrumentation.

Week 3

Lab #1b: Introduction to CAD tools for mask design. Please download Lab1bFiles (zip archive) that includes templates for the CAD tools. Account passwords for computer lab will be given to students by T.As. during lab sections.

Note: When you download password protected pdf and zip files under Mac OSX, sometimes the file will fail to open upon clicking on it. Download the file instead on the desktop and open it there, do not open directly from the browser window.

Week 4

Lab #2_FC: (Lithography I)

Week 5

Lab #3_FC: (KOH etch), Seidel Paper (pdf)

Week 6

Lab #4_FC: (Oxidation I)

Week 7

Lab #5_FC: (Alluminum evaporation)

Week 8

Lab #6_FC: (Lithography II, metal patterning)

Week 9

Lab #7_FC: (Lithography III, oxide removal)

Week 10

Lab #8_FC: (Anodic Bonding)

Week 11

Packaging and preparation for testing.

Week 12

Testing and experimental results analysis.

Week 13

Testing and experimental results analysis.

Week 14 (12/8-9)

Class presentations and discussion.