Fall 2010StaffProfessor Andreas G. Andreou, 400 Barton Hall, 410-516-8361 (agaclass at gmail dot edu) Professor Jeff Tza-Huei Wang, 108 Latrobe Hall, 410-516-7086 (thwang at jhu dot edu) Mr. Huy Vo, Lab manager, 118 Clark Hall, 410-516-4048 (huyvo at bme dot jhu dot edu) Teaching and Laboratory Assistants Cyrus Beh, Teaching Assistant (cyrus.beh at gmail dot com) Alex Rhee, Teaching Assistant (alex.rhee at jhu dot edu) Sean McVeigh Laboratory Assistant (spmcveigh at jhu dot edu)Course Logistics
Course EthicsHomework and pre-laboratory assignments : In a laboratory course, you have ample opportunities for collaboration. Developing the ability to work within a group is certainly one of the objectives for this course. However, homework assignments, pre-lab write-ups and examinations must be done on your own. Please read here what you are supposed to do alone and how much you are allowed to collaborate.Laboratory safety and environment awareness: When working in the lab you must follow all proper procedures to avoid injuring yourself or anyone else that works with you. When disposing chemical waste it is important that you follow proper laboratory procedures to assure that our environment stays clean and free from contaminants. Please read the Laboratory Safety handout, and revisit it periodically to refresh yourself and especially when in doubt about a particular process or procedure. After reading the Laboratory Safety handout please download, print and sign the pledge to be a good lab citizen and follow all safety rules and regulations. The signed pledge must be handed in with the first homework assignment. |
Textbook
You can purchase either of these books from any online bookstore. The content is almost identical.
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Schedule and Syllabus To accommodate the large number of students enrolled in this course, two lab projects will be run in parallel. The two projects are: optical waveguides and the flow cytometer. These have similar process flows but are staggered in such a way to avoid conflicts with major equipment and instrumentation. In the laboratory schedule shown in the table below, Lab #X_WG refers to the optical waveguides and Lab #X_CY to the flow cytometer.
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Week |
Lecture topics |
Laboratory session |
1 9/1 AGA/JW |
Organizational meeting; (September 2th, 2009) |
No laboratory session |
2 9/8 JW |
Handout #1a (Introduction to Microfabrication) Handout #1b (Clean room training) Review of safety and clean room procedures Reading: Book Chapter 1 Handout #2b (Flow Cytometer on a Chip) Handout #2c (Optical Waveguides in Silicon) Reading: book chapter 2 sections 2.2, 2.4 and 2.7
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Lab #1a Laboratory orientation and instrumentation |
3 9/15 JW |
Handout #3 (Thermal Oxidation) Reading: book chapter 4 sections 4.1, 4.2, 4.3, 4.4, 4.9 |
CAD tools and mask design Lab1bFiles (zip) (Account passwords for computer lab will be given to students by T.As. during lab sections) |
4 9/22 JW |
Handout #4 (Photolithography
I) Reading: book chapter 7 sections 7.1, 7.2, 7.3, 7.4, 7.5, 7.6, 7.9, 7.10 |
Lab #2_FC (Lithography I) Lab #2_WG (Oxidation I) |
5 9/29 AGA |
Handout #5 (Photolithography II) Reading: book chapter 8 sections 8.1, 8.2, 8.3, 8.4, 8.5, 8.6, 8.9; book chapter 9 sections 9.1, 9.2, 9.3 |
Lab #3_FC
(KOH Etch)
Lab #3_WG (Lithography I) |
6 SP 10/6 |
Handout #6a
(Etching I: Wet Etching) Reading: book chapter 11 section 11.1; book chapter 19 section 19.5, Petersen paper section III, Williams/Muller paper, Madou handout Dr. Seungkyung Park (Guest Lecturer) |
Lab #4_FC
(Oxidation II) Lab #4_WG (KOH Etch) |
7 AGA 10/13 |
Handout #7 (Thin Film Deposition) Reading: book chapter 12 section 12.1, 12.2, 12.3, 12.4, 12.5, 12.6, 12.7, 12.14; book chapter 13 section 13.1, 13.2
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Lab #5_FC
(Aluminum Evaporation) Lab #5_WG (Oxidation II) |
8 10/20 AGA |
Handout #8
(Etching II: Dry Etching) Reading: book chapter 11 section 11.3, 11.4, 11.5, 11.6, 11.7, 11.10 |
Lab #6_FC
(Lithography II; Metal Patterning) Lab #6_WG (Shadow Mask Aluminum Evaporation)
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9 10/27 AGA/JW |
Midterm Examination
(Wednesday October 27) |
Lab #7_FC
(Lithography III; Oxide Removal) Lab #7_WG (SU-8 deposition and patterning)
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10 11/3 JW |
Handout #9 (Diffusion, Ion-implantation) Reading: book chapter 3 section 3.1, 3.2, 3.3, 3.4, 3.5, 3.6, 3.8; book chapter 5 section 5.1, 5.2, 5.3, 5.8 |
Lab #8_FC (Anoding Bonding) Lab #8_WG (Wafer Dicing)
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11 11/10 JW |
Softlithography and Micromolding |
Lab #10_FC (Testing) Lab #10_WG (Testing) |
12 11/17 AGA |
(Packaging and Advanced Packaging) (CMOS and MEMS Technologies) Reading: book chapter 16, sections 16.1, 16.2, 16.3, 16.4; book chapter 19 sections 19.6, 19.7, 19.8, 19.9 |
Testing |
13 12/1 AGA/JW |
Project presentation and discussion |
Equipment Use Guide uFab Lab Kiosk: prepared by La Vida Cooper (2002). Please send comments to the lab manager Mr. Huy Vo. Homework Assignments and Solutions
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CAD Tools Computer aided design is playing an important role in the development of the microelectronics industry. Sophisticated programs are necessary to do mask layout, to simulate the fabrication process, as well as the devices and circuits. At the system level CAD tools are also employed in high level synthesis of complex systems such as modern day microprocessors and graphics chips. For more information see our CAD tools page. Frequently Asked Questions How do I ... , where can I find ... , what is ... , ? Reading References 1. Introduction to Microelectronic Fabrication, 2nd Edition, Richard C. Jaeger, Volume V; Modular Series on Solid State Devices , G. W. Neudeck and R.F. Pierret eds., Prentice Hall, 2002. 2. Fundamentals of Microfabrication : The Science of Miniaturization, Marc J. Madou, CRC Press, 2nd edition, 2002. 3. Fundamentals of Semiconductor Fabrication, Gary S. May, Simon M. Sze, Wiley Publishers, April 2003. 4. Silicon as Mechanical Material , K. E. Petersen, Proceedings of IEEE, vol. 70, no. 5, pp. 420-457, May 1982 (pdf). 5. The 1.7 Kilogram Microchip: Energy and Material Use in The Production of Semiconductor Devices, E. D. Williams, R.U. Ayres, and M. Heller (pdf). Supplementary information (pdf) and Nature editorial on this article (pdf). Related JHU Links Whitaker Lithography and Fabrication Lab 520/530.773 Advanced Topics in Fabrication and Microengineering 520/530.487 Introduction to Microelectromechanical Systems (MEMS) 540.440/540.640 Chemical Engineering for Micro and Nano Technology Bibliography A collection of articles from previous years
Microfabrication, MEMS and Soft-Lithography Links Equipment and Supplies Links
Acknowledgements This course is supported by a Whitaker Foundation Development grant and by Kenan grants from the Whiting School of Engineering. Page maintained by A.G. Andreou, andreou at jhu.edu , Last update: Monday, December 13, 2010 |