Fall 1998
Lectures: Th 9-10, 310 Maryland Hall
Lab section I: Th 10-2, Whitaker Microfabrication Lab - New Engineering Building 213
Lab section II: Fr 9-1 Whitaker Microfabrication Lab - New Engineering Building 213
Lab section III: Fr 1-5 Whitaker Microfabrication Lab - New Engineering Building 213
Staff
Professor Andreas G. Andreou,
Zaven Kalayjian, (Teaching Assistant)
Michael G. Erickson, (Teaching Assistant/Grader)
Grading
(20%) Weekly homework problems,
(30%) Written, mid-term examination
(30%) Written, final project report
(20%) Laboratory participation and lab-book
You can read
here what is that you are suppose to submit every week in terms of laboratory writeups.WWW
Course Website: http://www.ece.jhu.edu/~andreou/495/
Textbooks
Richard C. Jaeger, Introduction to Microelectronic Fabrication, Addison-Wesley. Additionally, lecture notes and journal articles will be handed out as appropriate.
CAD Tools
Some of the laboratory, may require the use of
LEDIT, mask layout program.Schedule and Syllabus
Week |
Lecture topic(s) |
Laboratory session |
1 |
Organizational meeting, overview of microelectronic fabrication (Chapter 1), silicon for MEMS, K.E. Petersen 1982 paper |
|
2 |
Laboratory safety, laboratory protocols |
Lab # 1 Tour of laboratory and equipment, microscopy, profilometry. |
3 |
Project description; Samaun et.al. 1973 paper |
Lab # 2
CAD tools and mask design. |
4 |
Thermal oxidation of silicon (Chapter 3) Photolithography I (Chapter 2) Lecture Notes |
Lab # 3
Wafer oxidation. |
5 |
Diffusion (Chapter 4) |
Lab # 4
Boron diffusion, piezo-resistor formation. |
6 |
Etching; wet, chemical and plasma H. Seidel 1987 paper , K.E. Petersen 1982 paper |
Lab # 5
Anisotropic etching, membrane formation. |
7 |
Photolithography II (Chapter 2) |
Lab # 6
Wafer characterization, contact cuts formation. |
8 |
Film deposition (Chapter 6) |
Lab # 7
Aluminum deposition, contact and interconnect formation. |
9 |
Mid-term examination |
Lab # 8
Wafer electrical characterization. |
10 |
Ion implantation (Chapter 5) |
Lab # 9
Wafer dicing, packaging, bonding. |
11 |
Die processing and packaging (Chapter 8) |
Lab # 10
Microsensor testing and characterization |
12 |
CMOS and CMOS compatible MEMs technologies |
|
13 |
Thanksgiving |
|
14 |
Projects presentation and discussion |
Note: The laboratory sessions may be shifted as one or more steps in the process may have to be repeated.
Homework Assignments
Homework #1 Homework # 2 Homework # 3 Homework # 4 Homework # 5 Homework # 6References
Useful Local Links
Links to Microfabrication and MEMS at Universities
Acknowledgements
This course has been supported by a Whitaker Foundation Development grant and by a Kenan grant from the Whiting School of Engineering.
As of today (10/12/1998), thanks to the generous support of the Whitaker foundation, this course has a new home; a real clean room in the Biomedical Engineering Institute (to be) at Homewood campus
To see a tentative layout for the new facility click
here!Page maintained by A.G. Andreou,
andreou@jhu.edu , Last update: October 12, 1998