This graduate level laboratory course is an introduction to the principles of microfabrication for  sensors, MEMS, and  microsystems with applications in medicine and biology.  Course comprises of laboratory work and accompanying lectures that cover silicon oxidation, photolithography, thin film deposition,  wet and dry etching, and packaging. The course also introduces analysis and  design CAD tools. The syllabus, core assignments are the same as the undergraduate course 5xx.495. In addition, graduate students must complete a series of advanced computer laboratory assignments and projects using the process and technology simulation software T-SUPREME and the finite element analysis program FEMLAB .

Fall 2009