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520.487
Introduction to
Micro-electromechanical
Systems (MEMS)
A first course on the principles and engineering of micro-electromechanical
systems. An introduction to materials and basic devices with examples of
applications for sensing and actuation. Lectures will be complemented with laboratory experiments.
The final project will be a MEMS "soccer player" designed for participation in
the nanogram category RoboCup competition.
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